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Frequently Asked Questions

How are MEMS made?

MEMS devices start from a wafer made of silicon, polysilicon, glass or other material. In some processes, a series of etch steps are used to carve features, such as a micro mirror or cantilevered beam into a wafer. In other processes, multiple layers of a material, typically polysilicon, are deposited on the surface of a wafer and then etched away selectively, leaving complex multi-layered features such as comb drives, hinges, and latches on the surface.

MEMS devices are then tested, cut into dies, and often mounted on electronic circuit boards. Getting the process right is difficult and typically requires either extensive trial-and-error prototyping or sophisticated design tools that are linked closely to and validated by the specialized manufacturing processes used to produce MEMS.

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