MEMS stands for Micro Electro Mechanical System, a class of small
devices that integrates tiny mechanical and electrical components
on a silicon chip.
MOEMS stands for Micro Optical Electro Mechanical System, which in
addition to mechanical and electrical components, integrate wave guides
or other optical features into the body of the silicon chip. MST,
commonly used in Europe, stands for Micro System Technology and is
often used to describe MEMS.
