Modeling And Characterization for Reliability Of Silicon
MEMS
Project number - IST-2001-34714

Dolphin Integration

STMicroelectronics

LANCASTER University

ISLI

Objectives

  • Develop new MEMS models that include package effects, pre-stress, mode coupling and failure modes
  • Develop a new modelling methodology based on analytical and behavioural techniques for MEMS

Use of Cosserat theory to generate VHDL-AMS models
Include failure mode effects into VHDL-AMS models
Main project demonstrator - electro-static actuator for a HDD

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