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Modeling
And Characterization
for Reliability Of
Silicon
MEMS |
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Project number - IST-2001-34714
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Project partners
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Dolphin Integration Contact: VOSSKAEMPER, Lars |
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STMicroelectronics, Milan MEMS Business Unit via Tolomeo 1- C.P.176 Contact: DE MASI, Biagio |
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LANCASTER University Departement of Engineering Contact: RICHARDSON, Andrew
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ISLI Sub-contractor - ISLI - Institute for Systems Level Integration, Scotland |
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