Yield prediction in an automotive MEMS application with help of statistical analysis packages SAE J27484. ASIM Workshop, Wismar, ISBN 9783901608339, P. 251-256D.Dammers, D.Schollän, L.M.Voßkämper
May 29, 2008
This paper shows a methodology for the yield prediction of Micro Electro Mechanical Systems (MEMS). Variations of process properties during the production of MEMS are considered in system simulations. Yield prediction based on the distribution functions provided by statistical analysis packages SAE J2748 is demonstrated on a capacity based accelerometer system...